Residual Gas Analyzer
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Residual Gas Analyzer - 1

Compact design for ease of installation /¡\ Please read the operation manual before using this product to ensure safe and proper handling of the product. • The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. • It is strictly forbidden to copy the content of this catalog in part or ¡n full. • All brand ñames, product ñames and service ñames, in this catalog are trademarks or reglstered trademarks of their respective companies. HEAD OFFICE 11-5, Hokodate-cho, Kamitoba, M¡nam¡-ku, Kyoto, 601-8116 Japan HORIBA STEC Co., Ltd TAIWAN Branch 3F., No.18, Lañe 676, Jhonghua Rd., Jhubei City, Hsinchu County 302, Taiwan (R.O.C.) Tainan Office 1E, No.117, Chenggong Rd., Shanhua Township, Tainan County 741, Taiwan (R.O.C.) HORIBA TRADING (SHANGHAI) Co., Ltd. Room 1701, United Plaza 1468 Nanjing Rd. West Shanghai 200040 CHINA Beljlng Office Room 1801, Capital Tower Beijing, Tower 1 No.6 Jia, Jianguomenwai Ave. Chaoyang District Beijing 100022, China Shenzhen Office 701 Room, A6th Building, FuTong Tianjun Garden, Western HePing Road, LongHua Town, BaoAn District, Shenzhen City, GuangDong Provience 518000, China Shanghai Service Cerner Zhangjiang Hi-tech Park, Shanghai 201203, CHINA http://www.semi. horiba.com 110, Suntech-City, 513-15, Sangdaewon-Dong, Jungwon-K^> Sungnam-City, Kyungki-Do, 462-725 Korea HORIBA INSTRUMENTS (SINGAPORE) Pte. Ltd. 10 Ubi Crescent, Lobby B #05-11/12 Ubi techpark Singapore 408564 Santa Clara Head Office (Technology Cerner) 3265 Scott Boulevard Santa Clara, CA 95054 Austin Office 9701 Dessau Rd., Surte 605, Austin, TX 78754 Portland Office Reno Office (R&D Cerner) 605 Spice Island Drive, #5, Sparks, NV 89431 Dallas Office 670 International Parkway, Ste. 170 Richardson, TX 75081 315 Derry Road, Suite 13 Hudson, NH 03051, USA Kyoto Cióse, Summertiouse Rd., Moulton Park, BURO club Gieres, 2 Avenue de Vígnate 38610 Gieres, France Bijsterhuizen 11 -58, 6546 AS Nijmegen, The Netherlands HORIBA EUROPE GmbH Zur Wetterwarte 10 Haus 109 01109 Dresden Germany MICROPOLE System Quadrupole Mass Spectrometer Compact design with high pressure performance Complying with all RoHS regulations The Corporate Social Responsibility (CSR) of companies involves, among other things, working to protect the environment. As a company within the HORIBA Group, a leader in environmental analysis equipment, HORIBA STEC is always striving to develop and manufacture environmentally sound producís. RoHS regulations: RoHS stands for "Restriction of Hazardous Substances" and is a set of regulations enforced in the EU to limit the use of six hazardous substances: lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs) and polybrominated diphenyls (PBDEs), In electrlc and electronic components.

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Residual Gas Analyzer - 2

MICROPOLE System Quadrupole Mass Spectrometer most compact* residual gas analyzers: detects trace gases in a vacuum One of the world's most compact and lightest* residual gas analyzers with the capability to detect trace gases even in a low vacuum. The MICROPOLE System was developed by HORIBA STEC using all the company's technologies for gas analysis and gas process control ¡n relatively small vacuum chambers and ¡n the deposition process of functional thin films. We explored the possibility of using this system under various conditions and designed a mass detector with 9 quadrupoles to...

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Residual Gas Analyzer - 3

The quality control and improvement in operation rate made possible by analysis can reduce costs and increase production. The MICROPOLE System can be mounted on a 34 mm diameter equipment flange and ¡s compact ¡n size, with a length of 21 to 31 mm. Chamber pressure control and residual gas analysis not only increase production but also help reduce costs. Collecting Information »Measure contamination > Real time monitoring ■ ► External leak check ► Internal leak check (valve leak) >Out-gas monitor Correspondí • Countermeasure > Chamber condition monitoring > Quality control with physical...

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